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Proven processes for ensuring semiconductor device reliability

Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide.

Coverage includes:

• Basic device physics

• Process flow for MOS manufacturing

• Measurements useful for device reliability characterization

• Hot carrier injection

• Gate-oxide integrity (GOI) and time-dependent dielectric breakdown (TDDB)

• Negative bias temperature instability

• Plasma-induced damage

• Electrostatic discharge protection of integrated circuits

• Electromigration

• Stress migration

• Intermetal dielectric breakdown

Procurando Semiconductor Process Reliability in Practice (English Edition)? Aqui você encontra tudo sobre este livro de Zhenghao Gan, publicado por McGraw Hill. Nesta página estão a descrição da obra, os detalhes da edição e os formatos disponíveis para baixar: pdf, ibook, epub, kindle. Se você gosta de Livros Internacionais, Engenharia e Transporte, Engenharia, Elétrica e Eletrônica, Ótica, Optoeletrônica, explore também outros títulos da mesma categoria no Porto do livro Português. Veja ainda as outras obras de Zhenghao Gan em nosso catálogo.